Posted on 6/25/09

6” (150 mm) Probe Stations, bare, and as kit, with or without microscope.

On 150 mm or 6” probe stations the scope is typically a compound microscope.
When probing the smaller features of 150 mm wafers a stereo zoom scope is not any more adequate. A compound scope and fiberoptic illumination is a better option for magnification above 150 - 200X.
Mitutoyo has the perfect solution with the Finescope, albeit at a pretty elevated price. See Industrial Scopes for Finescope (above $10K) solutions and lower cost alternatives like the Motic PSM-1000 (above $8K) or Meiji’s FU1000 (around $4K) based solutions. Or if you would like a zoom scope then Qioptiq’s AZoom 2 and Micro are perfevct choices. If budget is an important consideration then a zoom scope based on Meiji parts wins hand down

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Description

Part # / Price

8in Probe Station kit, scope not included, 2 mid-size micropositioners, probe holders/tips

PSESLC8M       €7875 US$10599

8in Probe Station kit, scope not included, 2 large micropositioners, probe holders/tips

PSESLC8L         €8656  US$11649

8in Probe Station BD-8, scope not included, 2 micropositioners, probe holders/tips

PSESBD8        €11107 US$14948

8in Probe Station BD-8, FU based scope with 5X and 20X LWD objectives, 2 micropositioners, probe holders/tips

PSESBD80520K       €14462  US$19464

8in Probe Station BD-8, FU based scope with 20X and 50X LWD objectives, 2 micropositioners, probe holders/tips

PSESBD82050K       €14860  US$19999

300 mm / 12in Probe Station BD-12, scope not included, 2 micropositioners, probe holders/tips

PSESBD12         €20519 US$27615

300 mm / 12in Probe Station BD-12, FU based scope with 5X and 20X LWD objectives, 2 micropositioners, probe holders/tips

PSESBD80520K       €23179  US$31195

300 mm / 12in Probe Station BD-12, FU based scope with 20X and 50X LWD objectives, 2 micropositioners, probe holders/tips

PSESBD82050K       €24259  US$32649

300 mm / 12in Probe Station BD-12, FU based scope with 5X and 20X LWD objectives, 2 micropositioners, probe holders/tips

PSESBD80520K       €23179  US$31195

300 mm / 12in Probe Station BD-12, FU based scope with 20X and 50X LWD objectives, 2 micropositioners, probe holders/tips

PSESBD82050K       €24259  US$32649

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