Probe Stations for various wafer sizes. bare or as kits with or  without microscope.

Posted on 06/25/09

PSECG196Z70

Complete Cryogenic Probe Station with Optem Zoom 70XL, CCD imaging kit with 17" LCD display, fiber optic illumination

Probe Station comes with a vacuum chamber with integrated micropositioners. Temperature can be controlled in a range from 80 degree Kelvin to 480 K through liquide nitrogen flow and heater element in chuck with control loop.
Shipping weight 300 kg or 661 lbs, typical shipped as sea freight takes 2 to 6 weeks depending on destination.
Pricing includes setup support at destination by factory trained engineer. That includes instruction on operation of complete system, temperature and vacuum control, minimising condensation problems etc. Engineer is scheduled to stay 2 work days at your site. Additional time is optional.
FEATURES:
Heavy Duty base frame with top base plate and leveling on all 4 legs, microscope bridge with move aside option for easy access to vacuum chamber.
Temperature control module allows maintaining temperature between 80 degree Kelvin to 480 deg K in chuck area.
Supplied standard vacuum pump allows to maintain 10¯³  torr, higher performance vacuum pump is optional.
External micrometer controlled micropositioners allow 25 mm travel with 10 micron resolution in X, Y, Z direction, coaxial tip holder with screw clamping.

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$

59850

€

44470

£

38201

AUD

79111

Rs

3029337

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MICROSCOPE:
Consisting of following parts:
1X TV tube
Manual Zoom 70XL unit with 0.7 to 4.5X zoom range
Lower function module with coaxial port, no auxiliary lens used, focusing with standard coarse focus block, WD = 89 mm
With 1/3" CCD sensor size FOV is 4.80 x 6.40 mm at low and 0.69 x 0.91 mm at high magnification. Magnification on a 17" LCD screen is about 290X.
Optionally magnification can be changed by adding auxiliary lenses (0.18X - 2.0X), using different TV tubes (0.375X - 2.0X), using amplifiers (2X, 3X, 4X), or by using Mitutoyo style LWD objectives as front end, adapter will be needed.
Illumination is by fiber optic light guide with continuously adjustable light source.
Move aside option on microscope bridge allows easy access to vacuum chamber. Microscope stage with 1" (25 mm) X-Y adjustment lets you move the field of view to the next target.

1 year manufacturer warranty
Because of packaged weight only shipping by freight is available. We will send you a separate shipping quote based on your location.

Vacuum chamber with 40 mm dia chuck connects with vacuum bellows to positioners, view port on top allows observation of chuck area through microscope. 4 female BNC connectors from probe holders
SPECIFICATIONS:
Vacuum chuck with 40 mm diameter
Temperature

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