Posted on 6/25/09

Probe Stations, bare, and as kit, with or without microscope.

On 100 mm or 4” probe stations the scope options are stereo zoom microscopes from Meiji or supplied by the probe station manufacturer.
When probing smaller features a stereo zoom scope is not any more adequate. That applies to 150 mm / 6” and larger wafers and even to 100 mm / 4” stations on testing high density dies or other high density parts. A compound scope and fiberoptic illumination is a better option for magnification above 150 - 200X.
Mitutoyo has the perfect solution with the Finescope, albeit at a pretty elevated price. See Industrial Scopes for Finescope (above $10K) solutions and lower cost alternatives like the Motic PSM-1000 (above $8K) or Meiji’s FU1000 (around $4K) based solutions.

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Description

Part # / Price

100mm / 4in Probe Station bare, no scope manipulators tips

PSESPE4B         €2211  US$2975

100mm / 4in Probe Station bare, wide platen bars, no scope manipulators tips

PSESPE4BW        €2228 US$2999

Complete 100mm / 4in Probe Station kit with scope, 2 micropositioners, probe holders/tips

PSESPE4C         €3711  US$4995

Complete 100mm / 4in Probe Station kit with scope, wide platen bars, 2 micropositioners, probe holders/tips

PSESPE4CW        €3749 US$5045

Complete 100mm / 4in Probe Station kit with scope, wide platen bars, 2 mid-size micropositioners, probe holders/tips

PSESPE4CWM       €4193 US$5643

Complete 100mm / 4in Probe Station kit with Meiji EMZ-5 scope, 2 micropositioners, probe holders/tips

PSESPE4CE5       €4131 US$5560

Complete 100mm / 4in Probe Station kit with Meiji EMZ-5 scope, wide platen bars, 2 micropositioners, probe holders/tips

PSESPE4CWE5      €4168  US$5610

Complete 100mm / 4in Probe Station kit with Meiji EMZ-5 scope, wide platen bars, 2 mid-size micropositioners, probe holders/tips

PSESPE4CWE5 M        €4646  US$6253

Complete 100mm / 4in Probe Station kit with Meiji based compound scope, 5x and 20X LWD objective, 2 mid size micropositioners, probe holders/tips

PSESPE4CWMM K0520        €7110  US$9569

Complete 100mm / 4in Probe Station kit with Meiji based compound scope, 5x and 20X LWD objective, 2 full size micropositioners, probe holders/tips

PSESPE4CWLM K0520        €8003  US$10771

Complete 100mm / 4in Probe Station kit with Meiji EMZ-5 scope, 2 micropositioners, probe holders/tips

PSESKP4CE5       €6869 US$9245

Complete 100mm / 4in Probe Station kit with Meiji based compound scope, 5x and 20X LWD objective, 2 mid size micropositioners, probe holders/tips

PSESKP4CMMK 0520         €9819  US$13215

Complete 100mm / 4in Probe Station kit with scope, 2 micropositioners, probe holders/tips

PSESKP4C         €6163  US$8295

100mm / 4in Probe Station kit, no scope, 2 micropositioners, probe holders/tips

PSESKP4        €5164  US$6950

6in Probe Station kit, scope not included, 2 micropositioners, probe holders/tips

PSESLC6        €6455  US$8688

6in Probe Station kit, scope not included, 2 mid-size micropositioners, probe holders and 1 box of tips

PSESLC6M       €6881 US$9261

6in Probe Station kit, scope not included, 2 large micropositioners, probe holders and 1 box of tips

PSESLC6L         €7662  US$10312

150mm/6in Probe Station kit with Meiji Techno compound microscope, 5X and 20X LWD objectives, 2 mid-size micropositioners, probe holders and 1 box of tips

PSESLC6MM05 20K        €10372 US$13959

6in Probe Station kit with Meiji Techno compound microscope, 5X and 20X LWD objectives, 2 large micropositioners, probe holders and 1 box of tips

PSESLC6LM052 0K         €11145 US$14999

6in Probe Station kit with Mitutoyo FS70 compound microscope, 5X and 20X LWD objectives, 2 mid-size micropositioners, probe holders and 1 box of tips

PSESLC6MMI05 20         €17302 US$23286

6in Probe Station kit with Mitutoyo FS70 compound microscope, 5X and 20X LWD objectives, 2 large micropositioners, probe holders and 1 box of tips

PSESLC6LMI05 20         €18085 US$24339

8in Probe Station kit, scope not included, 2 mid-size micropositioners, probe holders/tips

PSESLC8M       €7875 US$10599

8in Probe Station kit, scope not included, 2 large micropositioners, probe holders/tips

PSESLC8L         €8656  US$11649

6in Probe Station BD-6, scope not included, 2 micropositioners, probe holders/tips

PSESBD6        €9621  US$12948

8in Probe Station BD-8, scope not included, 2 micropositioners, probe holders/tips

PSESBD8        €11107 US$14948

8in Probe Station BD-8, FU based scope with 5X and 20X LWD objectives, 2 micropositioners, probe holders/tips

PSESBD80520K       €14462  US$19464

8in Probe Station BD-8, FU based scope with 20X and 50X LWD objectives, 2 micropositioners, probe holders/tips

PSESBD82050K       €14860  US$19999

300 mm / 12in Probe Station BD-12, scope not included, 2 micropositioners, probe holders/tips

PSESBD12         €20519 US$27615

300 mm / 12in Probe Station BD-12, FU based scope with 5X and 20X LWD objectives, 2 micropositioners, probe holders/tips

PSESBD80520K       €23179  US$31195

300 mm / 12in Probe Station BD-12, FU based scope with 20X and 50X LWD objectives, 2 micropositioners, probe holders/tips

PSESBD82050K       €24259  US$32649

300 mm / 12in Probe Station BD-12, FU based scope with 5X and 20X LWD objectives, 2 micropositioners, probe holders/tips

PSESBD80520K       €23179  US$31195

300 mm / 12in Probe Station BD-12, FU based scope with 20X and 50X LWD objectives, 2 micropositioners, probe holders/tips

PSESBD82050K       €24259  US$32649

Complete Cryogenic Probe Station with support structure, vacuum chamber, temperature control, liquide nitrogen module, 4 integrated micropositioners, microscope

PSECG196         €44470 US$59850

Complete Cryogenic Probe Station with Meiji Techno EMZ-13VX microscope, fiber optic illumination and ¼ wave plate in rotatable mount

PSECG196MVX      €46276 US$62280

Complete Cryogenic Probe Station with Optem Zoom 70XL, CCD imaging kit with 17" LCD display, fiber optic illumination

PSECG196Z70        €44470  US$59850

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