Block details

Buiding Blocks for Probe Stations or build your own specialized test fixture.



	Posted on 06/25/09

PSECKPE4Z


	100mm / 4in vacuum chuck + stage for probe station, Z axis adjust

100 mm / 4" Vacuum Chuck and Stage assembly for probe station. When building your own test fixture or custom probe station this buiding block will solve your thorniest issue.
Stage assembly supplies X-Y and Z-axis adjustments. Chuck will hold down device under test through vacuum. Pattern supports 4", 3", 2" wafers. Vacuum pump will be needed and is not included in this offer.
FEATURES:
Ideal for small wafers, 100 mm / 4" or less
Chuck stage front and side adjustable
Chuck theta coarse adjustment
Z axis adjustment with micrometer
Backlash-free movement
SPECIFICATIONS:
100 mm / 4" stainless steel vacuum chuck
Chuck stage allows 4" x 4" travel in X-Y directions
Chuck theta: coarse adjustment up to 30 degrees
4 mounting holes with M8 threads on 75 x 75 mm square

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	Total height from mounting plane to top of chuck 140 mm / 5.5" ± 2 mm 0.4 mm / 63.5 tpi spindles Net weight: 3.6 kg or 8 lbs Operational Requirements: 7 liter/min 250 mmHg vacuum supply 1 year manufacturer warranty

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